PVD chamber  chamber build  WxZ chamber 

Etch             MxP+, Super-e, DPS, 4520, 4420, 9600, 9400,

PECVD        C1, Sequel, Speed, Altus, DxZ, WxZ, Gigafill, Ultima,

RTP             Xe+, Radiance

PVD             IMP, TxZ, SiP, PC2, Std, Coherent