periodic table step coverage 1 Hydrophobic

 pt35 deliver deposition solutions for microsystems and semiconductor applications;

Process                        Applications Example

PECVD                           a-Si, Oxide, Nitride, HDP, Dopants, Tungsten

PVD                               Cu, Al, transition metals, Va, Pt, Au

Anneal                           RTP, RTO, RTN

Coatings                        hydrophobic, hydrophilic, memsstar® SPD