Platforms
P5000, Centura, Rainbow, Alliance, memsstar®
Process Chamber
Oxide Etch MxP, MxP+, eMxP, Super-e, 4520, i, XL, Excelan
Poly Etch MxP, MxP+, DPS, DPS Plus, 4420, XL, 9400, SE, PTX, DFM
Metal Etch MxP, MxP+, DPS, DPS Plus, 4720, 9600, SE, PTX, DFM
Isotropic Etch memsstar® SVR Xe, VHF