interconnect              etch trench

Process                                    Chamber

Oxide Etch                                 MxP, MxP+, eMxP, Super-e, 4520, i, XL, Excelan 

Poly Etch                                    MxP, MxP+, DPS, 4420,XL, 9400, SE, PTX, DFM

Metal Etch                                  MxP, MxP+, DPS, 4720, 9600, SE, PTX, DFM

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