C1 chamber              chamber

We specialise in Applied Materials, Lam Research, and Novellus Systems.

Our platform portfolio includes

              P5000       Centura     Endura    Producer

              Rainbow     Alliance

             Concept One     Concept Two

All systems are tested, installed and qualified to OEM specifications. We also deliver non standard applications for customers who are involved with new processes such as MEMS or proprietary schemes, and can assist with process development. For additional MEMS processing we have created the memsstar® platform for release etching and surface treatment, which can be delivered alongside the standard platforms above.